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Characterization of TiAl alloy films for potential application in MEMS bimorph actuators

✍ Scribed by X.X Qu; Q.X Zhang; Q.B Zou; N Balasubramanian; P Yang; K.Y Zeng

Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
140 KB
Volume
5
Category
Article
ISSN
1369-8001

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