Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices

✍ Scribed by Giorgio De Pasquale; Timo Veijola

• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 621 KB
• Volume: 5
• Category: Article
• ISSN: 1613-4982
• DOI: 10.1007/s10404-008-0264-x