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Characterization and electrical properties of high-kGdScO3thin films grown by atomic layer deposition

✍ Scribed by P. Myllymäki; M. Roeckerath; M. Putkonen; S. Lenk; J. Schubert; L. Niinistö; S. Mantl


Book ID
106020616
Publisher
Springer
Year
2007
Tongue
English
Weight
280 KB
Volume
88
Category
Article
ISSN
1432-0630

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