Characteristics of TiO 2 Surfaces Etched by Capacitively Coupled Radio Frequency N 2 and He Plasmas

✍ Scribed by Kawakami, Retsuo; Niibe, Masahito; Nakano, Yoshitaka; Konishi, Masashi; Mori, Yuta; Takeuchi, Hideo; Shirahama, Tatsuo; Yamada, Tetsuya; Tominaga, Kikuo

• Book ID: 121343843
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 900 KB
• Volume: 441
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/441/1/012038