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Simulation of Capacitively Coupled Dual-Frequency N 2 , O 2 , N 2 /O 2 Discharges: Effects of External Parameters on Plasma Characteristics

✍ Scribed by You, Zuowei; Dai, Zhongling; Wang, Younian

Book ID: 125527153
Publisher: IOP Publishing
Year: 2014
Tongue: English
Weight: 929 KB
Volume: 16
Category: Article
ISSN: 1009-0630
DOI: 10.1088/1009-0630/16/4/07

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