✦ LIBER ✦

Characteristics of Ruthenium Films Prepared by Chemical Vapor Deposition Using Bis(ethylcyclopentadienyl)ruthenium Precursor

✍ Scribed by Matsui, Yuichi; Hiratani, Masahiko; Nabatame, Toshihide; Shimamoto, Yasuhiro; Kimura, Shinichiro

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ruthenium Films Deposited by Liquid-Deli

✍ T. Hur'yeva; M. Lisker; E. P. Burte 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 392 KB

Morphological and structural characteris

✍ Jae Kyeong Jeong; Hoon Joo Na; Bum Seok Kim; Myung Yoon Um; Hyeong Joon Kim 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 473 KB

Structural characteristics of diamond fi

✍ F.S. Guo; S.C. Yu 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 395 KB

Chemical vapor deposition of ruthenium–p

✍ Bost, Daniel E.; Ekerdt, John G. 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 497 KB

Thermodynamic Calculations and Metallorg

✍ Kang, Sang Yeol; Choi, Kook Hyun; Lee, Seok Kiu; Hwang, Cheol Seong; Kim, Hyeong 📂 Article 📅 2000 🏛 The Electrochemical Society 🌐 English ⚖ 312 KB

Characteristics of TiOx films prepared b

✍ Gyeong Taek Lim; Do-Heyoung Kim 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 193 KB