Ruthenium Films Deposited by Liquid-Delivery MOCVD Using Bis(ethylcyclopentadienyl)ruthenium with Toluene as the Solvent

✍ Scribed by T. Hur'yeva; M. Lisker; E. P. Burte

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 392 KB
• Volume: 12
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200606484