Iridium Thin Films Deposited by Liquid Delivery MOCVD using Ir(EtCp)(1,5-COD) with Toluene Solvent

✍ Scribed by Y. Ritterhaus; T. Hur'yeva; M. Lisker; E. P. Burte

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 434 KB
• Volume: 13
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200706630