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Characteristics of TiOx films prepared by chemical vapor deposition using tetrakis-dimethyl-amido-titanium and water

✍ Scribed by Gyeong Taek Lim; Do-Heyoung Kim


Book ID
108288943
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
193 KB
Volume
498
Category
Article
ISSN
0040-6090

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