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Chemical vapor deposition of ruthenium–phosphorus alloy thin films: Using phosphine as the phosphorus source

✍ Scribed by Bost, Daniel E.; Ekerdt, John G.

Book ID: 122850492
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 497 KB
Volume: 558
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.03.018

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