✦ LIBER ✦
Thermodynamic Calculations and Metallorganic Chemical Vapor Deposition of Ruthenium Thin Films Using Bis(ethyl-π-cyclopentadienyl)Ru for Memory Applications
✍ Scribed by Kang, Sang Yeol; Choi, Kook Hyun; Lee, Seok Kiu; Hwang, Cheol Seong; Kim, Hyeong Joon
- Book ID
- 124095535
- Publisher
- The Electrochemical Society
- Year
- 2000
- Tongue
- English
- Weight
- 312 KB
- Volume
- 147
- Category
- Article
- ISSN
- 0013-4651
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