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Channel length scaling and the impact of metal gate work function on the performance of double gate-metal oxide semiconductor field-effect transistors

✍ Scribed by D. Rechem; S. Latreche; C. Gontrand


Book ID
107588562
Publisher
Springer-Verlag
Year
2009
Tongue
English
Weight
568 KB
Volume
72
Category
Article
ISSN
0304-4289

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Experimental study on isolation edge eff
✍ Toshiyuki Oishi; Katsuomi Shiozawa; Akihiko Furukawa; Yuji Abe; Yasunori Tokuda; πŸ“‚ Article πŸ“… 1999 πŸ› Elsevier Science 🌐 English βš– 265 KB

We investigate experimentally the isolation edge shape effects on the short channel characteristics, i.e. the gate length dependence, of metal oxide semiconductor field effect transistors (MOSFETs) for various isolation structures, as compared with a reference MOSFET without influence of the isolati