Channel Hot-Carrier Degradation in Short-Channel Transistors With High- $k$/Metal Gate Stacks
โ Scribed by Amat, E.; Kauerauf, T.; Degraeve, R.; De Keersgieter, A.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Groeseneken, G.
- Book ID
- 120825554
- Publisher
- IEEE
- Year
- 2009
- Tongue
- English
- Weight
- 287 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1530-4388
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๐ SIMILAR VOLUMES
A comparison between pMOS and nMOS short channel transistors with high-k dielectric subjected to channel hot-carrier (CHC) stress is presented. Smaller CHC degradation is observed in pMOS devices. At high temperature, the CHC degradation increases for pMOS and nMOS. The temperature dependence of the
## Abstract The degradation produced by channel hotโcarrier (CHC) on short channel transistors with highโk dielectric has been analyzed. For short channel transistors (__L__<0.15โยตm), the most damaging stress condition has been found to be __V__~G~=__V__~D~ instead of the โclassicalโ __V__~G~=__V__