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Boron depth profiles in silicon and simulation of α-spectra

✍ Scribed by Changgeng Liao; Hui Jian; Yongqiang Wang; Zhihao Zheng

Book ID
113284777
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
379 KB
Volume
95
Category
Article
ISSN
0168-583X

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✍ Gautier, B.; Dupuy, J. C.; Prost, R.; Prudon, G. 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 533 KB

In this paper, an iterative algorithm is used in order to deconvolve some real and simulated SIMS proÐles of boron-doped layers in silicon. The real SIMS proÐles are obtained by the analysis of delta layers of boron-doped silicon in a silicon matrix, analysed in a Cameca IMS3/4f instrument at obliq