Effectiveness and Limits of the Deconvol
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Gautier, B.; Dupuy, J. C.; Prost, R.; Prudon, G.
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Article
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1997
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John Wiley and Sons
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English
β 533 KB
In this paper, an iterative algorithm is used in order to deconvolve some real and simulated SIMS proΓles of boron-doped layers in silicon. The real SIMS proΓles are obtained by the analysis of delta layers of boron-doped silicon in a silicon matrix, analysed in a Cameca IMS3/4f instrument at obliq