X-ray determination of lattice damage depth-profiles due to electronic and nuclear energy losses in silicon implanted with MeV boron ions

✍ Scribed by R. Fabbri; M. Servidori; F. Cembali; R. Nipoti; M. Bianconi

• Book ID: 113282891
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 281 KB
• Volume: 66
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(92)95427-s