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Atomic-scale dynamics during silicon oxidation and the properties of defects at the Si–SiO2 interface

✍ Scribed by Sokrates T Pantelides; Madhavan Ramamoorthy

Book ID: 117149986
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 250 KB
Volume: 254
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00444-5

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