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Multiple thermal oxidation of silicon and the electrophysical properties of silicon oxide films and the Si-SiO2 bonding layer

✍ Scribed by D. Kropman; P. Langovits; M. Vinnal; B. Meyler


Book ID
107862200
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
344 KB
Volume
34
Category
Article
ISSN
0040-6090

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