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Changes in the optical properties of films of silicon nitride, silicon oxinitride, and silicon oxide upon ion irradiation

✍ Scribed by N. N. Gerasimenko; T. I. Kovalevskaya; V. G. Pan'kin; K. K. Svitashev; G. M. Tseitlin

Publisher
Springer US
Year
1977
Tongue
English
Weight
202 KB
Volume
26
Category
Article
ISSN
0021-9037

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