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Hydrogenation of silicon nitride and silicon oxynitride films deposited by reactive sputtering: Optical properties

✍ Scribed by Schalch, D. ;Scharniann, A. ;Wolffut, R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties of silicon nitride and silico

✍ Mirsch, S. ;Bauer, J. 📂 Article 📅 1974 🏛 John Wiley and Sons 🌐 English ⚖ 339 KB

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✍ T. Kanata; H. Takakura; Y. Hamakawa 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 772 KB