✦ LIBER ✦

Properties of silicon nitride and silicon oxynitride films prepared by reactive sputtering

✍ Scribed by Mirsch, S. ;Bauer, J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Silicon nitride and oxynitride films pre

✍ V.A. Burdovitsin 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Hydrogenation of silicon nitride and sil

✍ Schalch, D. ;Scharniann, A. ;Wolffut, R. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 258 KB

Silicon nitride films prepared by reacti

✍ J. Buch; J. Červenák 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 304 KB

Properties of silicon nitride films prep

✍ Y. Hirohata; N. Shimamoto; T. Hino; T. Yamashima; K. Yabe 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 410 KB

IR transmittance studies of hydrogen-fre

✍ Dirk Schalch; Arthur Scharmann; Robert Wolfrat 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 446 KB

Optical properties of reactively sputter

✍ E Paule; E Elizalde; JM Martínez-Duart; JM Albella 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 233 KB