Optical and compositional studies of bur
Optical and compositional studies of buried oxide layers in silicon formed by high dose implantation
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R.J. Chater; J.A. Kilner; E. Scheid; S. Cristoloveneau; P.L.F. Hemment; K.J. Ree
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Article
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1987
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Elsevier Science
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English
β 353 KB