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Atomic mixing of silver into a silicon substrate using a 45 keV beam of Ar+ ions

✍ Scribed by J.J. Jimenez-Rodriguez; N.P. Tognetti; T. Marsh; R. Collins

Book ID: 113276466
Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 465 KB
Volume: 2
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(84)90316-1

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