✦ LIBER ✦
The optimization of sawtooth gratings using RCWA and its fabrication on a slanted silicon substrate by fast atom beam etching
✍ Scribed by Lee, ChaBum; Hane, Kazuhiro; Lee, SunKyu
- Book ID
- 121455415
- Publisher
- Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 875 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0960-1317
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