Estimating lateral straggling of boron profiles ion implanted into crystalline silicon with a tilt angle of 0° using off-angle substrates

✍ Scribed by Suzuki, K.; Tanahashi, K.; Nagayama, S.; Magee, C.W.; Buyuklimanli, T.H.; Iwamoto, E.

• Book ID: 114618253
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 186 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.872908