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Ion mixing in Ag-films on Si-substrates induced by a high fluence 40Ar+ beam with a flux of 0.2 μA/cm2

✍ Scribed by N.M. Masoud; D.-E. Arafah; K.H. Becker

Book ID
114166276
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
258 KB
Volume
198
Category
Article
ISSN
0168-583X

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