Sputtering yield and atomic mixing calculation of 200 Å thick Cu film bombarded by 180 keV Ar ions

✍ Scribed by O.F. Goktepe; P.A. Treado; J.M. Lambert; A.M. Vincenz

• Book ID: 113280368
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 260 KB
• Volume: 40-41
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(89)90982-8