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Atomic Layer Deposition of NiO by the Ni(thd)2/H2O Precursor Combination

✍ Scribed by Erik Lindahl; Mikael Ottosson; Jan-Otto Carlsson

Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
580 KB
Volume
15
Category
Article
ISSN
0948-1907

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