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NiO Thin Films Synthesized by Atomic Layer Deposition using Ni(dmamb)2 and Ozone as Precursors

✍ Scribed by Peter Antony Premkumar; Michael Toeller; Christoph Adelmann; Johan Meersschaut; Alexis Franquet; Olivier Richard; Hilde Tielens; Bert Brijs; Alain Moussa; Thierry Conard; Hugo Bender; Marc Schaekers; Jorge A. Kittl; Malgorzata Jurczak; Sven Van Elshocht

Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 966 KB
Volume: 18
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.201106949

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