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Atomic layer deposition of HfO2 on graphene from HfCl4 and H2O

✍ Scribed by Alles, Harry ;Aarik, Jaan ;Aidla, Aleks ;Fay, Aurelien ;Kozlova, Jekaterina ;Niilisk, Ahti ;Pärs, Martti ;Rähn, Mihkel ;Wiesner, Maciej ;Hakonen, Pertti ;Sammelselg, Väino

Book ID: 111489205
Publisher: Walter de Gruyter GmbH
Year: 2011
Tongue: English
Weight: 987 KB
Volume: 9
Category: Article
ISSN: 2391-5471
DOI: 10.2478/s11534-010-0040-x

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