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Real-Time Monitoring in Atomic Layer Deposition of TiO 2 from TiI 4 and H 2 O−H 2 O 2

✍ Scribed by Kukli, Kaupo; Aidla, Aleks; Aarik, Jaan; Schuisky, Mikael; Hårsta, Anders; Ritala, Mikko; Leskelä, Markku

Book ID: 120195640
Publisher: American Chemical Society
Year: 2000
Tongue: English
Weight: 175 KB
Volume: 16
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la0004451

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