Atomic Layer Deposition of HfO 2 Thin Films Exploiting Novel Cyclopentadienyl Precursors at High Temperatures

✍ Scribed by Niinistö, Jaakko; Putkonen, Matti; Niinistö, Lauri; Song, Fuquan; Williams, Paul; Heys, Peter N.; Odedra, Rajesh

• Book ID: 125976729
• Publisher: American Chemical Society
• Year: 2007
• Tongue: English
• Weight: 297 KB
• Volume: 19
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm0626583