Application of Sputter-Assisted EPMA to Depth Profile Analysis
โ Scribed by Lesch, Norbert ;Aretz, Anke ;Pidun, Markus ;Richter, Silvia ;Karduck, Peter
- Book ID
- 113050996
- Publisher
- Springer-Verlag
- Year
- 2000
- Weight
- 172 KB
- Volume
- 132
- Category
- Article
- ISSN
- 0344-838X
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
## Abstract We study theoretically the distortion of marker layers embedded in homogeneous media due to energetic ion bombardment. For realistic relocation crossโsections, we have solved the balance equation, first proposed by Sigmund and coโworkers, for the evolution of irradiated polyatomic targe
A reรned approach to the calculation of Auger depth proรles by means of principal component analysis (PCA) is presented. The reรnement consists of the use of normalized spectra. In this way, a more reliable determination of the number of chemical compounds and their location in the depth proรle is p