Refined Approach to PCA-assisted Auger Depth Profile Analysis

✍ Scribed by Schöpke, A.; Kelling, S.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 360 KB
• Volume: 25
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199701)25:1<5::aid-sia197>3.0.co;2-h

✦ Synopsis

A reÐned approach to the calculation of Auger depth proÐles by means of principal component analysis (PCA) is presented. The reÐnement consists of the use of normalized spectra. In this way, a more reliable determination of the number of chemical compounds and their location in the depth proÐle is possible. Moreover, the use and the archiving of external standard spectra and the calculation of unknown standard spectra are simpliÐed. The method is described in detail by the analysis of an Ðlm on Si.

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