Sputter depth profile analysis of marker layers

✍ Scribed by J. A. Peinador; I. Abril; J. J. Jiménez-Rodríguez; A. Gras-Marti

• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 314 KB
• Volume: 15
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740150804

✦ Synopsis

Abstract

We study theoretically the distortion of marker layers embedded in homogeneous media due to energetic ion bombardment. For realistic relocation cross‐sections, we have solved the balance equation, first proposed by Sigmund and co‐workers, for the evolution of irradiated polyatomic targets. The collisional mixing operator accounts for recoil mixing, isotropic cascade mixing and surface barrier effects.

Following the evolution with ion fluence of the marker concentration profiles, we can obtain the tracer yield, which is related directly to the as‐recorded intensity in a SIMS experiment. The influence of the surface barrier on signal broadening also will be discussed.