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Depth profile analysis: coatings and thin layers

โœ Scribed by Beatriz Fernandez; Rosario Pereiro

Publisher
Springer
Year
2010
Tongue
English
Weight
68 KB
Volume
396
Category
Article
ISSN
1618-2650

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## Abstract We study theoretically the distortion of marker layers embedded in homogeneous media due to energetic ion bombardment. For realistic relocation crossโ€sections, we have solved the balance equation, first proposed by Sigmund and coโ€workers, for the evolution of irradiated polyatomic targe