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Interpretation of Auger depth profiles of thin SiC layers on Si

✍ Scribed by Ecke, Gernot ;R��ler, Hans ;Cimalla, Volker ;Pezoldt, J�rg

Publisher: Springer-Verlag
Year: 1997
Weight: 321 KB
Volume: 125
Category: Article
ISSN: 0344-838X
DOI: 10.1007/bf01246186

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