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Phase Composition of Thin Films as Revealed by Auger Depth Profiling

✍ Scribed by Besuknkov, V. G. ;Kopetskii, Ch. V. ;Shiyanov, Yu. A.

Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
447 KB
Volume
114
Category
Article
ISSN
0031-8965

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## Abstract The depth resolution in Auger in‐depth profiles of TiN thin films on smooth Si substrates is determined by the evolution of a sputter‐induced surface roughness. It is shown that this effect depends critically on the ion angle of incidence. Therefore, the depth resolution can be improved