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Application of spectrum synthesis method to depth profile analysis

โœ Scribed by Isao Kojima; Natsuo Fukumoto; Masayasu Kurahashi; Tetsuya Kameyama


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
441 KB
Volume
50
Category
Article
ISSN
0368-2048

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Depth profiles were taken by x-ray photoelectron spectrometry/Ar-ion sputtering from copper sheets oxidized during 30 min in air at 200 or 3OO"C, respectively. The data of the depth profiles were subjected to factor analysis in order to determine the relevant components of the copper oxide layers. F