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Analysis of multi-layered structures by a non-conventional Auger depth profiling method

✍ Scribed by C. Gatts; W. Losch

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 300 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)94052-r

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