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Theoretical analysis of AES depth profiling in multilayers: Application to C/W multilayers

✍ Scribed by J.P. Petrakian; P. Renucci

Publisher: Elsevier Science
Year: 1987
Weight: 65 KB
Volume: 186
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(87)90637-2

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