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AES depth profile studies of interdiffusion in thin polycrystalline Au-Ag multilayer films

✍ Scribed by Antoni Bukaluk; Wacław Bała

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
555 KB
Volume
45
Category
Article
ISSN
0169-4332

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Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-A1 multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to g