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Applicability of focused ion beams for nanotechnology

✍ Scribed by P.W.H. de Jager; P. Kruit

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 284 KB
Volume: 27
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)00117-d

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