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Characterization of compact ICP ion source for focused ion beam applications

✍ Scribed by P.Y. Nabhiraj; Ranjini Menon; G. Mohan Rao; S. Mohan; R.K. Bhandari

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 735 KB
Volume: 621
Category: Article
ISSN: 0168-9002
DOI: 10.1016/j.nima.2010.04.069

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## Abstract Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis. In this article the merits of using these systems are discussed and the three main techniques used to prepare cross‐section specimens for transmission