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Characterization of focused ion beam induced damage

✍ Scribed by D. Vetterli; M. Do¨beli; R. Mu¨hle; P.W. Nebiker; C.R. Musil

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 708 KB
Volume: 27
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)00120-j

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