𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A comparison of focused ion beam and electron beam induced deposition processes

✍ Scribed by S. Lipp; L. Frey; C. Lehrer; E. Demm; S. Pauthner; H. Ryssel

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
261 KB
Volume
36
Category
Article
ISSN
0026-2714

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

The assessment of microscopic charging e
The assessment of microscopic charging effects induced by focused electron and ion beam irradiation of dielectrics
✍ Marion A. Stevens-Kalceff; Katie J. Levick πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 358 KB

## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or pre‐existing de