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Simulation of ion beam assisted deposition—a comparison with experimental results

✍ Scribed by AM Ektessabi; S Sato; H Kitamura; Y Masaki

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 466 KB
Volume: 44
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(93)90156-5

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