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Analysis of the infrared transmission data of hydrogenated amorphous silicon film fabricated by high rate PECVD

โœ Scribed by W. Hu; Florence Y. M. Chan; D. P. Webb; Y. C. Chan; Y. W. Lam


Book ID
112815837
Publisher
Springer US
Year
1996
Tongue
English
Weight
334 KB
Volume
25
Category
Article
ISSN
0361-5235

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