High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film

✍ Scribed by Sera, K.; Okumura, F.; Uchida, H.; Itoh, S.; Kaneko, S.; Hotta, K.

• Book ID: 114536232
• Publisher: IEEE
• Year: 1989
• Tongue: English
• Weight: 565 KB
• Volume: 36
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.40970