A high-performance polysilicon thin-film transistor using XeCl excimer laser crystallization of pre-patterned amorphous Si films

✍ Scribed by Min Cao; Talwar, S.; Kramer, K.J.; Sigmon, T.W.; Saraswat, K.C.

• Book ID: 114536425
• Publisher: IEEE
• Year: 1996
• Tongue: English
• Weight: 829 KB
• Volume: 43
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.485538